- 专利标题: Method for manufacturing improved NIR CMOS sensors
-
申请号: US16068724申请日: 2016-12-30
-
公开(公告)号: US10256270B2公开(公告)日: 2019-04-09
- 发明人: Giovanni Margutti , Andrea Del Monte
- 申请人: LFOUNDRY S.R.L.
- 申请人地址: IT
- 专利权人: LFOUNDRY S.R.L.
- 当前专利权人: LFOUNDRY S.R.L.
- 当前专利权人地址: IT
- 代理机构: The Belles Group, P.C.
- 优先权: IT102016000002587 20160113
- 国际申请: PCT/EP2016/082948 WO 20161230
- 国际公布: WO2017/121630 WO 20170720
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
A method for manufacturing a CMOS image sensor for near infrared detection. The method includes: a) providing a silicon wafer; b) performing a germanium implantation in a portion of a front side of the silicon wafer; c) performing an annealing so as to cause thermal diffusion of implanted germanium species, thereby forming silicon-germanium alloy lattice in a first silicon-germanium region exposed on the front side of the silicon wafer; d) carrying out the steps b) and c) one or more times; and e) forming first photodetector active areas in portions of the first silicon-germanium region downwards extending from the front side of the silicon wafer, wherein said first photodetector active areas are sensitive to both near infrared and visible radiations. The first photodetector active areas are formed also in portions of the silicon wafer extending below said portions of the first silicon-germanium region.
公开/授权文献
- US20190027532A1 METHOD FOR MANUFACTURING IMPROVED NIR CMOS SENSORS 公开/授权日:2019-01-24
信息查询
IPC分类: