- 专利标题: Forming method of via hole and manufacturing method of pixel structure
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申请号: US15788813申请日: 2017-10-20
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公开(公告)号: US10256261B2公开(公告)日: 2019-04-09
- 发明人: Chin-Tzu Kao , Chien-Pang Tai , Pei-Nong Lu
- 申请人: Chunghwa Picture Tubes, LTD.
- 申请人地址: TW Taoyuan
- 专利权人: Chunghwa Picture Tubes, LTD.
- 当前专利权人: Chunghwa Picture Tubes, LTD.
- 当前专利权人地址: TW Taoyuan
- 代理机构: JCIPRNET
- 优先权: CN201710717486 20170821
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L21/311
摘要:
The invention provides a forming method of a via hole, including: sequentially stacking a patterned first conductive layer, a first insulating layer, a patterned second conductive layer, and a second insulating layer on a substrate. The second conductive layer and the first conductive layer overlap in a normal direction of the substrate, such that the second insulating layer has a protrusion portion protruding away from the substrate. A photosensitive material layer covers the second insulating layer. The photosensitive material layer is exposed, wherein a depth of exposure is equal to a vertical distance from a top surface of the protrusion portion to a surface of the photosensitive material layer. The exposed photosensitive material layer is removed by development to form a first via hole exposing the second insulating layer. The exposed second insulating layer is etched to form a second via hole to expose the second conductive layer, and then the photosensitive material layer is removed. A manufacturing method of a pixel structure, using the forming method of the via hole, is also provided.
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