Invention Grant
- Patent Title: Resonant biaxial MEMS reflector with piezoelectric actuators, and projective MEMS system including the same
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Application No.: US15805705Application Date: 2017-11-07
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Publication No.: US10225530B2Publication Date: 2019-03-05
- Inventor: Domenico Giusti , Roberto Carminati
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102015000078398 20151130
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H04N9/31 ; G02B7/182 ; G02B26/10 ; B81B3/00

Abstract:
A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.
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