- 专利标题: Wafer-scale fabrication of vertical optical couplers
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申请号: US14993340申请日: 2016-01-12
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公开(公告)号: US10222552B2公开(公告)日: 2019-03-05
- 发明人: Stevan S. Djordjevic , Xuezhe Zheng , Ashok V. Krishnamoorthy
- 申请人: Oracle International Corporation
- 申请人地址: US CA Redwood Shores
- 专利权人: Oracle International Corporation
- 当前专利权人: Oracle International Corporation
- 当前专利权人地址: US CA Redwood Shores
- 代理机构: Park, Vaughan, Fleming & Dowler LLP
- 主分类号: G02B6/122
- IPC分类号: G02B6/122 ; G02B6/293 ; G02B6/12
摘要:
An integrated circuit is described. This integrated circuit includes an optical waveguide defined in a semiconductor layer, and a dielectric optical waveguide disposed on the semiconductor layer and that overlaps a region of the optical waveguide. Moreover, the dielectric optical waveguide includes an optical device (such as a mirror) on a facet separating a first portion of the dielectric optical waveguide and a second portion of the dielectric optical waveguide. The facet may be at an angle relative to a plane of the dielectric optical waveguide and may include a metal layer. During operation, an optical signal conveyed by the optical waveguide is evanescent coupled to the dielectric optical waveguide. Then, the optical signal may be reflected by the optical device. For example, the angle of the facet may be 45°, so that the optical signal is reflected normal to the plane of the dielectric optical waveguide.
公开/授权文献
- US20170199327A1 WAFER-SCALE FABRICATION OF VERTICAL OPTICAL COUPLERS 公开/授权日:2017-07-13
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