Vacuum evaporation device and method thereof, and organic light-emitting display panel
摘要:
A vacuum evaporation device, a vacuum evaporation method, and an organic light-emitting display panel are provided. The vacuum evaporation device comprises at least a first evaporation chamber. The first evaporation chamber includes at least one first organic material evaporation source and at least one first metal evaporation source. The at least one first organic material evaporation source is configured to evaporate a first organic material, and the at least one first metal evaporation source is configured to evaporate a first metal material. The at least one first organic material evaporation source and the at least one first metal evaporation source are controlled to perform evaporation simultaneously to generate blend doping of a first organic material and a first metal material on a substrate disposed within the first evaporation chamber.
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