发明授权
- 专利标题: Vacuum evaporation device and method thereof, and organic light-emitting display panel
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申请号: US15486722申请日: 2017-04-13
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公开(公告)号: US10170730B2公开(公告)日: 2019-01-01
- 发明人: Yuji Hamada , Jinghua Niu , Wei He , Honggang Yan , Lei Lv , Xiangcheng Wang
- 申请人: Shanghai Tianma AM-OLED Co., Ltd. , Tianma Micro-Electronics Co., Ltd.
- 申请人地址: CN Shanghai CN Shenzhen
- 专利权人: SHANGHAI TIANMA AM-OLED CO., LTD.,TIANMA MICRO-ELECTRONICS CO., LTD.
- 当前专利权人: SHANGHAI TIANMA AM-OLED CO., LTD.,TIANMA MICRO-ELECTRONICS CO., LTD.
- 当前专利权人地址: CN Shanghai CN Shenzhen
- 代理机构: Anova Law Group, PLLC
- 优先权: CN201611074944 20161128
- 主分类号: H01L51/00
- IPC分类号: H01L51/00 ; H01L51/56 ; C23C14/24 ; H01L51/50 ; C23C14/04 ; C23C14/06
摘要:
A vacuum evaporation device, a vacuum evaporation method, and an organic light-emitting display panel are provided. The vacuum evaporation device comprises at least a first evaporation chamber. The first evaporation chamber includes at least one first organic material evaporation source and at least one first metal evaporation source. The at least one first organic material evaporation source is configured to evaporate a first organic material, and the at least one first metal evaporation source is configured to evaporate a first metal material. The at least one first organic material evaporation source and the at least one first metal evaporation source are controlled to perform evaporation simultaneously to generate blend doping of a first organic material and a first metal material on a substrate disposed within the first evaporation chamber.
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