- 专利标题: Semiconductor device and method of manufacturing the same
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申请号: US15799772申请日: 2017-10-31
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公开(公告)号: US10157974B2公开(公告)日: 2018-12-18
- 发明人: Takuo Funaya , Hiromi Shigihara , Hisao Shigihara
- 申请人: Renesas Electronics Corporation
- 申请人地址: JP Kawasaki-Shi, Kanagawa
- 专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人地址: JP Kawasaki-Shi, Kanagawa
- 代理机构: McGinn I.P Law Group, PLLC.
- 优先权: JP2012-279843 20121221
- 主分类号: H01L49/02
- IPC分类号: H01L49/02 ; H01L23/495 ; H01L23/522 ; H01L27/06 ; H01L27/12 ; H01L23/00
摘要:
A semiconductor device includes a semiconductor substrate having a main surface, a first insulating film formed on the main surface, a first coil formed on the first insulating film, a second insulating film formed on the first coil and having a first main surface and first side surfaces continuous with the first main surface, a third insulating film formed on the first main surface of the second insulating film and having a second main surface and second side surfaces continuous with the second main surface, and a second coil formed on the second main surface of the third insulating film. The second insulating film and the third insulating film are formed as a laminated insulating film together. A thickness of the second coil is greater than a thickness of the first coil in a thickness direction of the semiconductor substrate.
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