Invention Grant
- Patent Title: Integrated detection device, in particular detector of particles such as particulates or alpha particles
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Application No.: US14748961Application Date: 2015-06-24
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Publication No.: US10132934B2Publication Date: 2018-11-20
- Inventor: Sara Loi , Alberto Pagani
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza (MB)
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza (MB)
- Agency: Slater Matsil, LLP
- Priority: ITTO2014A0734 20140917
- Main IPC: G01T1/178
- IPC: G01T1/178 ; G01N15/02 ; G01N15/06 ; G01T1/24 ; G01T1/29 ; G01N15/00 ; G01N15/10 ; G01N1/22 ; F04B19/06 ; F04B37/00
Abstract:
A detection device is formed in a body of semiconductor material having a first face, a second face, and a cavity. A detection area formed in the cavity, and a gas pump is integrated in the body and configured to force movement of gas towards the detection area. A detection system of an optical type or a detector of alpha particles is arranged at least in part in the detection area.
Public/Granted literature
- US20160077218A1 INTEGRATED DETECTION DEVICE, IN PARTICULAR DETECTOR OF PARTICLES SUCH AS PARTICULATES OR ALPHA PARTICLES Public/Granted day:2016-03-17
Information query
