- 专利标题： Workpiece loader for a wet processing system
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申请号： US15193890申请日： 2016-06-27
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公开(公告)号： US10074554B2公开(公告)日： 2018-09-11
- 发明人: Arthur Keigler , Freeman Fisher , Daniel Goodman
- 申请人： TEL NEXX, Inc.
- 申请人地址： US MA Billerica
- 专利权人： TEL NEXX, INC.
- 当前专利权人： TEL NEXX, INC.
- 当前专利权人地址： US MA Billerica
- 代理机构： Rothwell, Figg, Ernst & Manbeck, P.C.
- 主分类号： B65G1/02
- IPC分类号： B65G1/02 ; H01L21/687 ; C25D7/12 ; C25D17/00 ; H01L21/677
摘要：
Techniques herein provide a workpiece handling and loading apparatus for loading, unloading, and handling relatively flexible and thin substrates for transport and electrochemical deposition. Such a system assists with workpiece holder exchange between a delivery cartridge or magazine, and a workpiece holder. Embodiments include a workpiece handler configured to provide an air cushion to a given workpiece, and maneuvering to a given workpiece holder that can edge clamp the workpiece.
公开/授权文献
- US20170372938A1 WORKPIECE LOADER FOR A WET PROCESSING SYSTEM 公开/授权日：2017-12-28
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