- 专利标题: Vapor delivery device, methods of manufacture and methods of use thereof
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申请号: US14990843申请日: 2016-01-08
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公开(公告)号: US10066296B2公开(公告)日: 2018-09-04
- 发明人: Egbert Woelk , Ronald L. DiCarlo, Jr.
- 申请人: Ceres Technologies, Inc.
- 申请人地址: US NY Saugerties
- 专利权人: Ceres Technologies, Inc.
- 当前专利权人: Ceres Technologies, Inc.
- 当前专利权人地址: US NY Saugerties
- 代理机构: Heslin Rothenberg Farley & Mesiti P.C.
- 主分类号: C23C16/455
- IPC分类号: C23C16/455 ; C30B25/14 ; C23C16/448 ; C23C16/52 ; C30B25/16 ; B01F3/02 ; B01F15/00 ; C30B29/40
摘要:
A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
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