- 专利标题: Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
-
申请号: US15239268申请日: 2016-08-17
-
公开(公告)号: US10044164B2公开(公告)日: 2018-08-07
- 发明人: Yung-Ho Alex Chuang , Xiaoxu Lu , Justin Dianhuan Liou , J. Joseph Armstrong , Yujun Deng , John Fielden
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Bever, Hoffman & Harms, LLP
- 主分类号: H01S3/10
- IPC分类号: H01S3/10 ; H01S3/00 ; H01S3/08 ; H01S3/083
摘要:
A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
公开/授权文献
信息查询