- 专利标题: Broken line repair method of TFT substrate
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申请号: US15117452申请日: 2016-06-20
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公开(公告)号: US10043834B2公开(公告)日: 2018-08-07
- 发明人: He Zhao , Kecheng Xie
- 申请人: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- 申请人地址: CN Shenzhen, Guangdong
- 专利权人: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN Shenzhen, Guangdong
- 代理商 Leong C. Lei
- 优先权: CN201610321552 20160512
- 国际申请: PCT/CN2016/086438 WO 20160620
- 国际公布: WO2017/193455 WO 20141116
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L21/66 ; G02F1/1362
摘要:
Disclosed is a broken line repair method of a TFT substrate. The method first finds out a broken line in the TFT substrate and a position of a broken point on the broken line. Then, positions of the passivation layer intersecting with the broken line at two ends of the broken point are processed, respectively to expose a metal layer, where the broken line is. Then, a metal growing film is formed on the passivation layer and the metal layer which is exposed at the two ends of the broken point. Finally, a protective film is formed on the surface of the metal growing film or the surface of the metal growing film is flattened and modified. By protecting the metal growing film or by flattening and modifying the surface of the metal growing film to reduce the roughness thereof, the breaking of the metal growing film can be prevented.
公开/授权文献
- US20180108687A1 BROKEN LINE REPAIR METHOD OF TFT SUBSTRATE 公开/授权日:2018-04-19
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