Zwitterionic photo-destroyable quenchers

Invention Grant

US10042251B2 Zwitterionic photo-destroyable quenchers 有权

Patent Title: Zwitterionic photo-destroyable quenchers
Application No.: US15281683

Application Date: 2016-09-30
Publication No.: US10042251B2

Publication Date: 2018-08-07
Inventor: Paul J. LaBeaume , James F. Cameron
Applicant: Rohm and Haas Electronic Materials LLC
Applicant Address: US MA Marlborough
Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC
Current Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC
Current Assignee Address: US MA Marlborough
Agency: Cantor Colburn LLP
Main IPC: G03F7/004
IPC: G03F7/004 ; C07D333/76 ; G03F7/32 ; G03F7/38 ; H01L21/027 ; C07C381/12 ; C07C309/12 ; G03F7/039

Abstract:

A photo-destroyable quencher having Formula (I): wherein in Formula (I), groups and variables are the same as described in the specification.

Public/Granted literature

Information query

Espacenet

IPC分类:

G	物理
G03	摄影术；电影术；利用了光波以外其他波的类似技术；电记录术；全息摄影术
G03F	图纹面的照相制版工艺，例如，印刷工艺、半导体器件的加工工艺；其所用材料；其所用原版；其所用专用设备（照相排版装置入B41B；为摄影用的感光材料或处理入G03C；电记录、感光层或处理入G03G）
G03F7/00	图纹面，例如，印刷表面的照相制版如光刻工艺；图纹面照相制版用的材料，如：含光致抗蚀剂的材料；图纹面照相制版的专用设备（用于特殊工艺的光致抗蚀剂结构见相关的位置，例如，B44C，H01L，例如，H01L21/00，H05K）
G03F7/004	.感光材料（G03F7/12，G03F7/14优先）