Invention Grant
- Patent Title: Method of inspecting device using first measurement and second measurement lights
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Application No.: US15233643Application Date: 2016-08-10
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Publication No.: US10020234B2Publication Date: 2018-07-10
- Inventor: Young-Jin Noh , Jung-Sub Lee , Sung-Mo Gu
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do KR Yongin-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.,SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.,SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do KR Yongin-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2015-0157543 20151110
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L27/12
Abstract:
A method for fabricating a substrate includes forming a first substrate including a thin film transistor array, and inspecting a first surface of an inspecting device, wherein inspecting the first surface of the inspection device includes: generating first measurement data by detecting a first measurement light that is parallel to a surface of an inspection region in the first surface, generating second measurement data by detecting a second measurement light that is parallel to the surface of the inspection region, and inspecting a state of a surface of the inspection region by comparing the first measurement data with the second measurement data.
Public/Granted literature
- US20170133280A1 METHOD FOR FABRICATING SUBSTRATE Public/Granted day:2017-05-11
Information query
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