- 专利标题: Impedance spectrometer with temperature-controlled micro-platform
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申请号: US15805698申请日: 2017-11-07
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公开(公告)号: US10008373B1公开(公告)日: 2018-06-26
- 发明人: William N Carr
- 申请人: William N Carr
- 主分类号: G01T1/02
- IPC分类号: G01T1/02 ; H01J49/02 ; G01N27/414 ; H01J49/00 ; G01R27/26 ; G01R33/00
摘要:
An impedance spectrometer comprised of a thermal micro-platform supported with phononic structured nanowires disposed within a micromachined structure is provided to identify, monitor and characterize a gas, vapor, solid or liquid analyte. The impedance sensor and analyte sensing element in embodiments are formed from a semiconductor SOI starting wafer.
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