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发明授权
CN1820194B 具有多检测器的扫描电子显微镜和基于多检测器成像方法 有权

具有多检测器的扫描电子显微镜和基于多检测器成像方法
摘要：
本发明公开了一种使用多个检测器(14，40)检测电子的方法和系统，所述方法包括下述步骤：引导原电子束通过一柱(column)以接触被检测对象(晶元)；通过引入强静电场，将由被检测对象(晶元)反射或散射的电子引向多个内部检测器(14，40)，同时至少一些被引导的电子以相对于所述被检测对象(晶元)较小的角度反射或散射；以及接收来自至少一个内部检测器的检测信号。
摘要（英）：

A system and method for multi detector (14, 40) detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object (wafer), directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects (wafer) towards multiple interior detectors (14, 40), whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object (wafer); and receiving detection signals from at least one interior detector.

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