This invention is a kind of high-efficiency thermal tuning resonant cavity enhancement mode probe. Its structure concludes: a substrate; a bonded boundary layer which is produced on the substrate; a first reflector produced on the bonded boundary layer, through which makes the first reflector and the substrate firmly bonding together; a extension layer produced on the first reflector. The extension layer forms the cavity part of the resonant cavity; a secondary reflector produced on the extension layer; a protection layer produced on the surface and flank of the probe active area part; heatingelectrode produced on the protection layer. The first probe electrode and secondary probe electrode are produced on the extension layer.