知搜-全球专利检索

  1. 登录
  2. 注册
发明公开
CN110998797A 切割加工方法 审中-实审

切割加工方法
摘要：
切割加工方法包括以下工序：在加工对象物(1)形成改性区域；以及在加工对象物(1)形成了改性区域之后，沿着切割预定线对加工对象物(1)进行切割。在对加工对象物(1)进行切割的工序中，通过在加工对象物(1)借助自重和吸附中的至少任一者固定于支承件的状态下，从加工对象物(1)的表面(3)朝向背面(4)实施干蚀刻处理，从而从加工对象物(1)的表面(3)直到背面(4)地形成槽。
摘要（英）：

This cutting method includes a step for forming a modified region in an object for processing (1), and a step for cutting the object for processing (1) along a cutting line after forming the modified region in the object for processing (1). In the step for cutting the object for processing (1), in a state where the object for processing (1) is fixed to a support material by the weight of the object for processing and/or adsorption, dry etching is performed from a front surface (3) to a rear surface (4) of the object for processing (1), thereby forming a groove from the front surface (3) to the rear surface (4) of the object for processing (1).

公开/授权文献
0/0