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发明公开
CN109490943A 一种用于离子束束流流强和位置测量的交叉多丝探针 有权

一种用于离子束束流流强和位置测量的交叉多丝探针
摘要：
本发明公开了一种用于离子束束流流强和位置测量的交叉多丝探针，包括传动座和氮化铝陶瓷支撑板，所述氮化铝陶瓷支撑板安装在辅助支撑架的上部，所述辅助支撑架一端通过销钉固定连接在传动座的上部，所述氮化铝陶瓷支撑板的内部中端安装有第二镀金钨丝靶，内部的一端安装有第一镀金钨丝靶，内部的另一端安装有第三镀金钨丝靶，所述第一镀金钨丝靶、第二镀金钨丝靶和第三镀金钨丝靶的顶部依次分别连接有第一信号线、第二信号线和第三信号线。该探针具有结构简单、加工方便、可靠性强，成本低廉的特点，可以分别测量束流流强、束流位置、束流剖面信息。可以为科研人员和分析人员提供可靠的束流信息。
摘要（英）：

The invention discloses a crossed multifilament probe for ion beam current flow intensity and position measurement. The probe comprises a transmission base and an aluminum nitride ceramic supporting plate; the aluminum nitride ceramic supporting plate is installed at the upper portion of an auxiliary supporting frame, and one end of the auxiliary supporting frame is fixedly connected to the upperportion of the transmission base through pins; a second gold-plated tungsten filament target is installed in the middle in the aluminum nitride ceramic supporting plate, a first gold-plated tungsten filament target is installed in one end in the aluminum nitride ceramic supporting plate, a third gold-plated tungsten filament target is installed in the other end in the aluminum nitride ceramic supporting plate, and the tops of the first gold-plated tungsten filament target, the second gold-plated tungsten filament target and the third gold-plated tungsten filament target are sequentially connected with a first signal line, a second signal line and a third signal line respectively. The probe has the advantages of being simple in structure, convenient to process, high in reliability and low in cost and can measure beam current intensity, beam current position and beam current section information separately and provide reliable beam current information for researchers and analysts.

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