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发明公开
CN108871389A 超声波传感单元及制作方法、超声波传感器及显示装置 有权

超声波传感单元及制作方法、超声波传感器及显示装置
摘要：
本发明实施例提供一种超声波传感单元及制作方法、超声波传感器及显示装置，涉及电子技术领域，能够进行超声波传感；该超声波传感单元包括位于基板上、且相对设置的第一电极和第二电极，以及位于第一电极和第二电极之间的绝缘层，第一电极相对于第二电极靠近基板；该超声波传感单元还包括：沿厚度方向上贯穿基板和第一电极的通孔，以及位于绝缘层中对应第一电极和第二电极位置的腔室；腔室与通孔连通；第二电极与腔室不接触。
摘要（英）：

The embodiment of the invention provides an ultrasonic wave sensor element and a making method, an ultrasonic wave sensor and a display device, relates to the electronic technical field, and can realize ultrasonic wave sensing; the ultrasonic wave sensor element comprises a first electrode and a second electrode arranged in opposite on a substrate, and an insulation layer arranged between the first electrode and the second electrode, wherein the first electrode is close to the substrate with respect to the second electrode; the ultrasonic wave sensor element also comprises a through hole thatpenetrates the substrate and the first electrode in a thickness direction, and a chamber arranged in the insulation layer and matched with the first and second electrodes; the chamber is connected with the through hole; the second electrode and the chamber do not make contact.

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