The invention relates to a hydrogen annealing furnace tail gas treatment system which comprises a tail gas outlet pipe and a hydrogen tail gas combustion apparatus. One end of the tail gas outlet pipeis connected with a reaction tube, and the other end of the tail gas outlet pipe is connected with the hydrogen tail gas combustion apparatus; and a hydrogen measurement assembly used for measuring tail gas flow and hydrogen concentration in the tail gas outlet pipe, an oxygen flow measurement assembly used for measuring flow of oxygen injected into the hydrogen tail gas combustion apparatus andan intelligent control operation terminal used for receiving data transmitted by the hydrogen measurement assembly and controlling the oxygen flow of the oxygen flow measurement assembly according tothe received data are further included. The invention further discloses a tail gas treatment method, by measuring the hydrogen concentration and the tail gas flow, according to the hydrogen concentration and flow, an appropriate amount of oxygen is led in, and after hydrogen sufficiently and safely burns inside the combustion apparatus, the tail gas is discharged into the atmospheric environment.The hydrogen annealing furnace tail gas treatment system has the beneficial effects of being high in control accuracy, good in safety performance, high in reliable performance, simple in structure andthe like.