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发明公开
CN107488835A 传送装置 无效 - 撤回

传送装置
摘要：
本发明提供一种能够在真空气氛的腔室内可靠地边冷却边运送被传送物的具有结构简单的冷却结构的传送装置。具有卷绕在至少两个辊(20、30)上、外表面上载置有基板(S)并环绕行进的传送带(10)。以位于各辊间彼此逆向行进的传送带的部分中载置有被传送物的一侧的部分为上带部(Uv)，另一侧的部分为下带部(Dv)，以上带部和下带部相对的方向为上下方向，在上带部的下表面和下带部的上下表面中的至少一面上，在上下方向隔规定间隔相向配置长度大于等于传送带的宽度的冷却面板(40)。还具有对冷却面板进行冷却的冷却装置(5)，以及向由冷却面板和传送带所限定的空间(60)中提供惰性气体的气体供给装置(70)。
摘要（英）：

The present invention provides a conveying apparatus having a simple structure of a cooling structure capable of reliably conveying an object to be conveyed while being cooled in a chamber of a vacuum atmosphere. Has a conveyor belt (10) wound around at least two rollers (20, 30) and having a substrate (S) placed on an outer surface thereof and traveling around. The upper belt portion (Uv) and the lower belt portion (Dv) are the portions on the side where the conveyed article is placed in the portion of the belt located between the rollers that run in opposite directions to each other, and the upper belt portion and the lower belt portion And a cooling panel (40) having a length equal to or greater than the width of the conveyor is disposed at a predetermined interval in the vertical direction on at least the lower surface of the upper belt portion and the upper and lower surfaces of the lower belt portion. There is also a cooling device (5) for cooling the cooling panel and a gas supply device (70) for supplying an inert gas into the space (60) defined by the cooling panel and the conveyor belt.

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