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发明授权
CN107479182B 光模块、电子设备、食物分析装置以及分光照相机 有权

光模块、电子设备、食物分析装置以及分光照相机
摘要：
本发明提供了光模块、电子设备、食物分析装置、分光照相机、以及波长可变干涉滤波器的驱动方法。该光模块具备波长可变干涉滤波器以及控制施加给静电致动器部的电压的电压控制部，该波长可变干涉滤波器具备相互相对的反射膜、以及具有第一静电致动器及第二静电致动器且用于改变反射膜间间隙的静电致动器部，电压控制部具备对第一静电致动器施加偏压的偏压驱动部、间隙检测器以及对第二静电致动器施加与检测出的间隙量相对应的反馈电压的反馈控制部。
摘要（英）：

A optical module includes, a wavelength variable interference filter (5) which include reflection films (54, 55) opposite to each other and an electrostatic actuator portion including a first electrostatic actuator (561) and a second electrostatic actuator (562) and changing a gap between the reflection films, and a voltage control portion (15) which controls voltage which is applied to the electrostatic actuator portion, the voltage control portion includes, a bias driving portion (151) which applies bias voltage to the first electrostatic actuator, a gap detector (152), and a feedback control portion (153) which applies feedback voltage corresponding to a detected gap amount to the second electrostatic actuator.

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