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发明公开
CN107199785A 阀驱动装置、功能液供应单元以及液滴喷吐装置 有权

阀驱动装置、功能液供应单元以及液滴喷吐装置
摘要：
本发明提供阀驱动装置、功能液供应单元以及液滴喷吐装置。能够在二次液室中尽量不产生余压的情况下将强制开放的自封阀的阀体闭合。一种阀驱动装置(37)针对包括：一次液室(62)；二次液室(64)；阀体(67)，其打开或关闭将一次液室和二次液室连通的连通流路(66)；受压部件(71)，将二次液室和大气液密地分隔；以及工作部件(72)，其将受压部件(71)的反应传给阀体，以打开或关闭阀体，并且受压部件具有使工作部件工作的受压板部(78)以及被设置于受压板部的周围的受压膜部(77a)的自封阀(36)，从二次液室的大气侧推压受压部件，并经由工作部件强制开放阀体，阀驱动装置包括推压驱动部(80)，先于受压膜部解开对受压板部的推压。
摘要（英）：

A valve driving device including a primary liquid chamber, a secondary liquid chamber, a valve body that opens and closes a communication flow channel through which the primary liquid chamber and the secondary liquid chamber are in communication, a pressure receiving member that partitions the secondary liquid chamber and atmospheric air in a liquid tight manner, and an operation member that opens and closes the valve body by transmitting the reaction of the pressure receiving member to the valve body, in which the pressure receiving member includes a pressure receiving plate portion that operates the operation member, and a pressure receiving film portion that is provided in the periphery of the pressure receiving plate portion, the valve driving device including a pressing driving portion that removes pressing of the pressure receiving plate portion prior to that of the pressure receiving film portion.

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