The present invention belongs to the semiconductor process equipment technical field and relates to a mechanical arm vacuum state multi-station detection device. The mechanical arm vacuum state multi-station detection device includes pressing mechanisms, vacuum pipelines, a locking mechanism, guide pillars, a supporting frame and a bottom plate; the two guide pillars are arranged on the bottom plate; the plurality of pressing mechanisms which are in elastic connection with one another are in slide fit with the two guide pillars; each of the pressing mechanisms is connected with one vacuum pipeline; one side or two sides of each of the pressing mechanisms are provided with the supporting frame connected with the bottom plate; the supporting frame is provided with the locking mechanism; the locking mechanism is used for locking the uppermost pressing mechanism; and a space between two adjacent pressing mechanisms is a measure station for detecting a mechanical arm. The mechanical arm vacuum state multi-station detection device of the invention is provided with a plurality of detection stations, and therefore, with the mechanical arm vacuum state multi-station detection device of the invention adopted, the vacuum state of the mechanical arm can be detected and tested repeatedly, the stability and reliability of the mechanical arm during a working process can be greatly improved, and a risk that defective products are loaded into equipment can be lowered.