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发明授权
CN107078000B 坚固的微机电开关 有权

坚固的微机电开关
摘要：
本发明涉及一种微机电系统开关(1)，包括信号输入线(4)，信号输出线(5)，电连接到线路(5)的可变形导电膜(2)，并包括面对线(4)的接触凹部(9)，膜(2)的致动电极(3)，其特征在于，膜(2)具有平面的圆形的形状，在信号输入线(4)的方向上具有径向开口(2a)，其从膜(2)的外周朝向中心变窄，接触凹部(9)形成在膜(2)的中心区域中，致动电极(3)具有与膜(2)相同的形状，并且膜(2)和致动电极(3)之间的间隙仅为气隙，其中膜(2)面向致动电极(3)。
摘要（英）：

A microelectromechanical system switch includes a signal input line, a signal output line, a deformable conducting membrane electrically connected to the signal output line and including a contact dimple facing the signal input line, and an actuation electrode. The membrane has a planar round shape, with a radial opening in the direction of the signal input line, narrowing from the periphery towards the center of the membrane, the contact dimple being formed in the central region of the membrane, the actuation electrode has the same shape as the membrane, and the gap between the membrane, facing the actuation electrode, and the actuation electrode is an airgap only.

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