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发明公开
CN107058974A 气体分散设备 审中-实审

气体分散设备
摘要：
一种与工艺腔室一起使用的气体分散设备，该气体分散设备包括：石英主体，该石英主体具有顶部、环和底板，该环耦接顶部的底表面，该底板具有多个分散孔相对于顶部耦接该环；多个石英板，所述多个石英板设置于顶部与底板之间，其中多个板被定位在彼此上方并间隔开来，以在多个板的每个板和该底板上方形成气室；多个石英管，所述多个石英管用以将气室耦接至多个分散孔，所述多个石英管的每个石英管具有设置于气室中的一个气室内的第一端，且所述多个石英管的每个石英管具有耦接分散孔中的一个分散孔的第二端；和多个导管，所述多个导管设置穿过该顶部，其中所述多个导管的每个导管耦接气室中的一个气室。
摘要（英）：

A gas dispersion apparatus for use with a process chamber, comprises: a quartz body having a top, a ring coupled to a bottom surface of the top and a bottom plate having dispersion holes coupled to the ring opposite the top; a plurality of quartz plates disposed between the top and the bottom plate, wherein the plurality of plates are positioned above one another and spaced apart to form a plenum above each of the plurality of plates and the bottom plate; a plurality of quartz tubes to couple the plenums to the plurality of dispersion holes, each of the plurality of quartz tubes having a first end disposed within one of the plenums and having a second end coupled to one of the dispersion holes; and a plurality of conduits disposed through the top, wherein each of the plurality of conduits is coupled to one of the plenums.

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