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发明公开
CN107024203A 物理量传感器、电子设备以及移动体 无效 - 撤回

物理量传感器、电子设备以及移动体
摘要：
本发明提供一种能够发挥优良的机械强度的物理量传感器、电子设备以及移动体。物理量传感器(1)具有：基板(2)；检测用翼板(47)，其以与基板(2)对置的方式而配置；质量部(41)，其对检测用翼板(47)进行支承；梁部(48)，其对检测用翼板(47)和质量部(41)进行连结；第一限制部(61)，其位于检测用翼板(47)与质量部(41)之间，并对检测用翼板(47)的向面内方向的位移进行限制。此外，第一限制部(61)被设置于呈矩形形状的检测用翼板(47)的角部处。
摘要（英）：

The invention provides a physical quantity sensor, an electronic apparatus and a mobile body capable of developing excellent mechanical strength. A physical quantity sensor (1) includes a substrate (2), a detection flap plate (47) disposed opposing to the substrate (2), a mass part (41) supporting the detection flap plate (47), a beam (48) connecting the detection flap plate (47) and the mass part (41), and a first regulating part (61) located between the detection flap plate (47) and the mass part (41) and regulating displacement of the detection flap plate (47) in a plane direction. The first regulating part (61) is disposed at a corner of the detection flap plate (47) that has a rectangular shape.

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