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发明公开
CN106929808A 一种超细粉体磁控溅射镀膜设备 有权

一种超细粉体磁控溅射镀膜设备
摘要：
本发明涉及一种超细粉体磁控溅射镀膜设备，包括投料口(1)、储料仓(2)、转动下粉装置(3)、振动盘(4)、超声波换能振动装置(5)、振动系统壳体(6)、镀膜机壳体(7)、旋振装置(8)、出料仓(9)、粉体传送管路(10)、屏蔽保护装置(11)、出料口(12)、旋转圆柱靶(13)、振动系统顶部防尘盖(14)、视窗口(15)和靶材支撑管(16)。该发明可以有效实现在不同粒径粉体表面获得均匀平整镀膜效果的目的，所制得的镀膜粉体具有优异的外观效果，并兼具催化、导电、导热等特性，在塑料、装饰漆、光催化等领域具有广泛的应用前景。
摘要（英）：

The invention relates to super-fine powder magnetron sputtering and coating equipment. The super-fine powder magnetron sputtering and coating equipment comprises a feed opening (1), a storage bin (2), a rotary powder discharging device (3), vibrating discs (4), ultrasonic transduction vibrating devices (5), a vibrating system housing (6), a coating machine housing (7), a rotary vibrating device (8), a discharge bin (9), powder conveying pipelines (10), shielding protection devices (11), discharge openings (12), rotary cylindrical targets (13), a vibrating system top dust-proof cover (14), view openings (15), and a target material supporting tube (16). Through the adoption of the super-fine powder magnetron sputtering and coating equipment disclosed by the invention, the purpose that the surface of powder of different grain diameters is uniformly and flatly coated can be effectively realized, the prepared coated powder has excellent appearance effect, and has characteristics of catalysis, electric conduction, heat conduction and the like; and the super-fine powder magnetron sputtering and coating equipment has wide application prospects in the fields of plastics, decorative paint, photocatalysis, and the like.

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