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发明公开
CN106794553A 第二表面激光烧蚀 有权

第二表面激光烧蚀
摘要：
一种从工件的对侧移除材料的方法包括将激光束导向至所述工件的第一侧以从所述工件的相对的第二侧移除材料。在第一方面中，提供了一种方法，该方法包括：提供工件，所述工件包括基底、设置在所述基底的第一表面上的涂布层、以及设置在所述基底的第二表面上的掩模；以及将激光束导向至所述工件，使得在所述激光束撞击所述涂布层之前所述激光束从所述第二表面穿过所述基底至所述第一表面，从而从所述工件移除所述涂布层的一部分。
摘要（英）：

A method of removing material from an opposite side of workpiece includes directing a laser beam at a first side of the workpiece to remove the material from an opposite second side of the workpiece. In a first aspect, a method is provided comprising: providing a workpiece comprising a substrate, a coating layer disposed over a first surface of the substrate, and a mask disposed over a second surface of the substrate; and removing a portion of the coating layer from the workpiece by directing a laser beam at the workpiece such that the laser beam passes through the substrate from the second surface to the first surface before the laser beam impinges on the coating layer.

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