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发明授权
CN106757338B 多晶硅铸锭炉的石墨加热器及多晶硅铸锭炉 有权

多晶硅铸锭炉的石墨加热器及多晶硅铸锭炉
摘要：
本发明涉及一种多晶硅铸锭炉的石墨加热器，包括：顶部加热器，包括电阻值相等的两部分及两个石墨电极，所述两个石墨电极按照将所述电阻值相等的两部分并联的方式接线；侧部加热器组件，包括围成一圈且电阻值相等的四部分及四个石墨电极，所述四个石墨电极按照将所述电阻值相等的四部分并联的方式接线。上述石墨加热器，顶部加热器和侧部加热器组件各包括阻值相等若干部分，通过石墨电极实现并联接线，能够保证顶部加热器的每一部分上的电压彼此相等，相同时间内发热量相等；及保证侧部加热器组件的每一部分的电压也彼此相等，相同时间内发热量相等，从而能够在铸锭炉内获得均匀的热场。还提出了一种具有上述加热器的多晶硅铸锭炉。
摘要（英）：

The invention relates to a graphite heater for a polycrystalline silicon ingot furnace. The graphite heater comprises a top heater and a side heater assembly, wherein the top heater comprises two parts having equal resistance values and two graphite electrodes; the two graphite electrodes are wired in such a manner that the two parts having equal resistance values are connected in parallel; the side heater assembly comprises four parts surrounding a circle and having equal resistance values and four graphite electrodes; the four graphite electrodes are wired in such a manner that the four parts having equal resistance values are connected in parallel. The top heater and the side heater assembly comprise several parts having equal resistance values, and are wired in parallel by the graphite electrodes, so that the graphite heater can ensure that voltages of various parts of the top heater are equal and heat values in the same time are equal, and ensure that voltages of various parts of the side heater assembly are equal and heat values in the same time are equal, so as to obtain uniform heat field in the ingot furnace. The invention further provides the polycrystalline silicon ingot furnace with the heater.

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