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发明授权
CN106716094B 压力传感器 有权

压力传感器
摘要：
本发明为具备以下部分的压力传感器（1）：具有空腔的传感器主体（2）、具有杆主体（20）和杆支承部（21A、21B）并且根据空腔与传感器主体（2）的外部的压力差进行弯曲变形的悬臂（3）、以及基于形成于杆主体（20）的主体电阻部（31）和形成于杆支承部（21A、21B）的杆电阻部（32）的电阻值变化来对悬臂（3）的移位进行检测的移位检测部（4）。在杆支承部（21A）形成有划分槽（40），所述划分槽将杆电阻部（32）划分为与检测电极（35）串联电连接的第一电阻部（32a）和位于与第一电阻部（32a）相比靠相邻的其他的杆支承部（21B）的第二电阻部（32b）。杆支承部（21A、21B）的第一电阻部（32a）经由经由了主体电阻部（31）的第一路径（S1）和经由了第二电阻部（32b）的第二路径S2的并联路径与检测电极（35）电连接。
摘要（英）：

The present invention is a pressure sensor (1) which includes a sensor main body (2) having a cavity, a cantilever (3) having a lever main body (20) and a lever support portion (21A, 21B) and which is bent according to a pressure difference between the cavity and the outside of the sensor main body (2), and a displacement detection unit (4) which detects displacement of the cantilever (3) based on resistance variation in resistance values of the main body-resistance portion (31) formed in the lever main body (20) and a lever-resistance portion (32) formed in the lever support portion (21A, 21B). A division groove (40) is formed in the lever support (21A), and the division groove (40) divides the lever-resistance portion (32) into a first resistance portion (32a) which is electrically connected to a detection electrode (35) in series and a second resistance portion (32b) which is positioned so as to be closer to the other adjacent lever support portion (21B) than the first resistance portion (32a). The first resistance portion (32a) of the lever support portion (21A, 21B) is electrically connected to the detection electrode (35) via a parallel path of a first path (S1) passing through the main body-resistance portion (31) and a second path (S2) passing through the second resistance portion (32b).

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