The invention relates to a device, method and system for amending the storing positions of substrates and relates to the field of industry manufacturing. The device is applied to a supporting frame and comprises a distance sensor set, a transmission assembly and a processing unit. The distance sensor set comprises two or more distance sensors on one side of the first margin of a face plate of the supporting frame and one or more distance sensors on one side of the second margin of the face plate of the supporting frame. The distance sensors on one side of the first margin of the face plate of the supporting frame are used for obtaining the distances between the first margin and the distance sensors on one side of the first margin of the face plate of the supporting frame correspondingly, and the distance sensors on one side of the second margin of the face plate of the supporting frame are used for obtaining the distances between the second margin and the distance sensors on one side of the second margin of the face plate of the supporting frame correspondingly. The transmission assembly is connected with the distance sensor set, and used for sending the distances between the first margin and the distance sensors on one side of the first margin of the face plate of the supporting frame and the distances between the second margin and the distance sensors on one side of the second margin of the face plate of the supporting frame to the processing unit. The processing unit is used for obtaining amending parameters of the positions of the substrates to be stored on the face plate of the supporting frame according to the information.