The invention discloses a tungsten coil surface activation-ozone oxidation treatment device for eliminating benzene series in waste gas. The device is composed of two parts: a gas premixing area and an oxidation reaction area. The device comprises a gas inlet valve, an ultrafine filter screen, a gas premixing four-way valve, an ozone generator, a nitrogen gas storage tank, a mixed gas nozzle, a metal tungsten coil, a stabilized power supply, and an exhaust valve. The special surface activation characteristic of ozone on the surface of certain simple substance metals is innovatively utilized; when a tungsten coil is electrified and is hot, ozone on the surface of the tungsten coil can rapidly release activated oxygen atoms to form a strong oxidizing environment on the surface of tungsten, when molecules containing conjugative effect C-C bonds such as benzene series are in the strong oxidizing environment, the conjugative C-C bonds will be broken by the activated oxygen atoms, the benzene series are oxidized and decomposed into inorganic molecules such as H2O, CO2, etc., and thus the benzene series in waste gas are eliminated finally.