The invention discloses an ultrasonic-piezoelectric synergetic sterilization technology, and relates to tetragonal phase BaTiO3, BaxY1-xTiO3, M@BaTiO3 or M@BaxY1-xTiO3 made of nano-micro piezoelectric materials, a preparation method thereof and an application thereof in sterilization, wherein Y is Sr<2+>, Sn<2+> or Ce<4+> and the like, M is Ag, Au, Pt or Pd and the like, and the piezoelectric sterilization efficiency is enhanced by effects of peak shifting, silver firing-like addition and the like. The ultrasonic-piezoelectric synergetic sterilization technology utilizes the own cavitation effect of ultrasonic waves for sterilization, also utilizes the cavitation effect to excite the nano-micro piezoelectric materials to generate cavities and active-oxygen free radicals so as to achieve the effect of synergetic sterilization. The ultrasonic-piezoelectric synergetic sterilization technology disclosed by the invention can convert mechanical energy into chemical energy for effective sterilization by utilizing simple piezoelectric materials and compound piezoelectric materials, not only can improve the efficiency of ultrasonic sterilization greatly, but also can utilize low-frequency vibrating mechanical energy widely existing in the natural environment, and is an environmental-friendly sterilization technology.