The invention belongs to the technical field of process design and electrical automation, and especially relates to an intelligent substation configuration file consistency guaranteeing method based on process control, which is specifically a configuration file check method in the field of process design and electrical automation. The method comprises guaranteeing the consistency of an ICD (IED Capability Description) configuration file and an SCD (System Configuration Description) configuration file in the process of intelligent substation construction, guaranteeing the consistency of the SCD configuration file and a CID (Configured IED Description) configuration file uploaded by a manufacturer to a server, and guaranteeing the consistency of the SCD configuration file and a CID configuration file installed in an actual device in the process of intelligent substation construction. A digital signature technology is introduced in the process of intelligent substation configuration file check, which provides a higher level of guarantee for configuration file version and content check. The invention is based on an intelligent substation construction and maintenance process, the process is specified and roles and functions are divided in process management, the content and information of check operation are managed and recorded, and thus, construction and maintenance of intelligent substations are strongly guaranteed.