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发明授权
CN105431943B 传感器、形成传感器的方法和装置 有权

传感器、形成传感器的方法和装置
摘要：
公开的传感器可以包括至少一个谐振器(在一些实施例中，至少两个谐振器)和可以与谐振器联合形成的各种其它结构。在实施例中至少一个谐振器可以包括底电极、压电层、和顶电极，其中压电层被定位在底电极和顶电极之间。
摘要（英）：

Disclosed sensors can include at least one resonator (in some embodiments, at least two resonators) and various other structures that may be formed in association with the resonators. The at least one resonator in embodiments can include a bottom electrode, a piezoelectric layer, and a top electrode, wherein the piezoelectric layer is positioned between the bottom electrode and the top electrode.

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