The invention discloses an array substrate, a display panel and a display apparatus. The array substrate comprises a substrate, a gate electrode and a semiconductor layer positioned on the substrate, an inter-layer insulating layer covering the gate electrode and the semiconductor layer, and a source electrode and a drain electrode positioned on the inter-layer insulating layer, wherein the inter-layer insulating layer comprises a first silicon nitride layer, a second silicon nitride layer and a first silicon oxide layer that are arranged in sequence from the bottom up along a direction perpendicular to the substrate; and percent content of hydrogen atoms of the first silicon nitride layer is greater than that of the second silicon nitride layer. A large amount of defects and residual charges in the interface between the first silicon nitride layer and the first silicon oxide layer are avoided, so that the TFT electric performance is improved, and the display quality is improved.