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发明公开
CN105247657A 管理装置、衬底处理系统、装置信息更新方法及存储介质 有权 转让

管理装置、衬底处理系统、装置信息更新方法及存储介质
摘要：
将与具有用于处理衬底的装置信息的衬底处理装置连接的管理装置构成为具有：设定部，设定所述装置信息中的成为所述装置信息的基准的基准装置信息；操作显示部，基于由所述设定部设定的所述基准装置信息，分别对提取从所述衬底处理装置获取的获取装置信息和所述基准装置信息之间的差异而得到的差异部和包含所述基准装置信息在内的所述装置信息的内容进行显示；和控制部，进行如下控制：当从所述操作显示部接收所述获取装置信息和所述基准装置信息之间的差异部的修正指示时，基于所述修正指示，修正所述获取装置信息并创建修正装置信息，并将该修正装置信息向所述衬底处理装置发送。
摘要（英）：

In the present invention, a management device, connected to a substrate processing device that retains device information for processing a substrate, is configured so as to comprise the following: a setting section for setting reference device information, from among the device information, which serves as a reference for the device information; a difference section obtained by extracting the difference between acquired device information acquired from the substrate processing device on the basis of the reference device information set by the setting section and the reference device information; an operation display section for displaying the content of the device information including the reference device information; and a control section for performing control so that, upon receiving from the operation display section a correction indicator of the difference section between the acquired device information and the reference device information, on the basis of the correction indicator, corrected device information is created by correcting the acquired device information, and the corrected device information is transmitted to the substrate management device.

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