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Invention Publication
CN105051485A 表征TSV微制造过程及其产品 有权

表征TSV微制造过程及其产品
Abstract:
描述了一种用于表征微制造过程及其产品的方法。通过确定TSV的顶端和底端的几何形状和位置，对形成有TSV的衬底进行了评估。可对所述衬底上形成的各个TSV以及TSV的整个图案进行评估。
Abstract(English):

A method for characterizing a microfabrication process and the product thereof is described. A substrate having TSV's formed therein is assessed by determining the geometries and positions of the top and bottom ends of a TSV. Individual TSV's as well as the entire pattern of TSV's formed in a substrate may be assessed.

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