The present invention provides an x-rayapparatus with a deflectable electron beam. The x-ray apparatus (1) comprises an electron beam source (2), emitting an electron beam (3), a target (4), onto which the electron beam (3) is directed, thus forming a focal spot (5; 5a, 5b) on the target (4), x-ray optics (6), collecting x-rays emitted from the focal spot (5; 5a, 5b) and forming an x-ray beam (8), - and a sample position (9) at which the x-ray beam (8) is directed, is characterized in that the x-ray apparatus (1) further comprises an electrostatic or electromagnetic electron beam deflection device (10), suitable for moving the focal spot (5; 5a, 5b) on the target (4), and in that in any direction (x, y, z) the extension of the focal spot (5; 5a, 5b) is smaller at least by a factor F, with F=1.5, than the extension of the target (4). With the x-ray apparatus, aligning the x-ray optics with respect to a microfocus x-ray source is simplified.