This technology relates generally to methods for the fabrication of high performance lenses, in particular, lenses including a glass carrier and an at least partially transmissive layer with one or more slope facets coupled together by one of more draft facets on a surface of the glass carrier. The methods involve identifying geometric errors in the slope and draft facets to create correction factors and forming corrected slope and draft facets based on the correction factors. This technology also relates to the resulting lenses and lens arrays.