A unit running protection device of ion excitation equipment is connected in series between each ion excitation unit of the ion excitation equipment and a high-voltage forming device, and comprises a plurality of protecting devices and an integrated sound-controlled and light-controlled component in circuit connection with the protecting devices, wherein each protecting device comprises a detection component in circuit connection with the high-voltage forming device, a current-limiting protection component in circuit connection with the detection component and the ion excitation unit, and a working condition integrating component in circuit connection with the detection component and the integrated sound-controlled and light-controlled component; when a certain ion excitation unit or a power supply loop of the ion excitation equipment fails, the unit running protecting device can cut off the supply circuit of a fault unit to quit the running of the fault unit and send an alarm signal to an upper computer; meanwhile, the other units go on working normally, and the running of the equipment is not affected, thereby maximizing the efficiency; the unit running protection device of the ion excitation equipment has the advantages of volume minimization, energy consumption minimization, structure simplification and cost economization.