知搜-全球专利检索

  1. 登录
  2. 注册
发明公开
CN103475329A 振动元件及其制造方法、振子、电子器件、电子设备 失效 - 权利终止

振动元件及其制造方法、振子、电子器件、电子设备
摘要：
振动元件及其制造方法、振子、电子器件、电子设备。本发明的课题是提供在高频（200MHz以上）时实现振动部的平行度的改善、抑制CI和电容比（γ）的劣化、等效串联电感（L1）和等效串联电容（C1）的偏差较小且抑制了谐振频率附近的寄生的振动元件及其制造方法。振动元件具有基板，该基板包含：振动部，其进行厚度剪切振动；以及激励电极，其形成于所述振动部的正反主面上，在设根据所述振动部的多个区域的各个板厚值求出的平均板厚值为H、所述振动部的多个区域的各个板厚值中的最大值与最小值之差即板厚差为△H时，所述H与所述△H之间的关系处于0%＜△H／H≤0.085%的范围内。
摘要（英）：

The invention relates to a resonator element, a resonator, an electronic device, an electronic apparatus, and a method of manufacturing the resonator element. The invention provides a resonator element which improves the degree of parallelism when the resonance frequency equals to 200 MHz or higher, suppresses the deterioration of the equivalent series capacitance C1 and capacitive ratio, minimizes the difference between the equivalent series inductance L1 and the equivalent series capacitance C1 and suppresses the parasitism near the resonance frequency. The resonator element includes a substrate including a vibrating portion that performs thickness-shear vibration and an excitation electrode provided on top and bottom main surfaces of the vibrating portion. Assuming that the average plate thickness calculated from the plate thicknesses of a plurality of regions of the vibrating portion is H and the plate thickness difference, which is a difference between the maximum and minimum values of the plate thicknesses of the plurality of regions of the vibrating portion, is DeltaH, 0%

公开/授权文献
0/0