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发明公开
CN103084354A 混合酸清洁组件 有权

混合酸清洁组件
摘要：
在一种实施方式中，一种清洁组件可以包括模块化电极密封壳体、酸注入口和流体注入口。该模块化电极密封壳体可以包括含有第一清洁空间的高压封闭件和含有第二清洁空间的低压封闭件。该酸注入口能与该高压封闭件中的第一清洁空间流体连通。该流体注入口能与该低压封闭件中的第二清洁空间流体连通。在正常操作过程中，可以将网状电极密封在该模块化电极密封壳体内，使得第一清洁空间位于该网状电极的第一侧，并且第二清洁空间位于该网状电极的第二侧。
摘要（英）：

In one embodiment, a cleaning assembly may include a modular electrode sealing housing, an acid injection inlet, and a fluid injection inlet. The modular electrode sealing housing may include a high pressure closure member that contains a first cleaning volume and a low pressure closure member that contains a second cleaning volume. The acid injection inlet can be in fluid communication with the first cleaning volume of the high pressure closure member. The fluid injection inlet can be in fluid communication with the second cleaning volume of the low pressure closure member. During normal operation, a showerhead electrode can be sealed within the modular electrode sealing housing such that the first cleaning volume is located on a first side and the second cleaning volume is located on a second side of the showerhead electrode.

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