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发明公开
CN102510669A 一种基板铜面的化学清洗方法 无效 - 驳回

一种基板铜面的化学清洗方法
摘要：
本发明属于基板加工技术领域，具体公开了一种基板铜面的化学清洗方法。它包括除油步骤、第一次溢流水洗步骤、微蚀步骤、第二次溢流水洗步骤、以及烘干步骤，在所述第一次溢流水洗步骤和微蚀步骤之间增加一除水步骤，在所述微蚀步骤的微蚀过程中不断回收硫酸铜，并根据微蚀液中各种成分的浓度变化补充微蚀液。本发明通过在微蚀之前除水、不断回收硫酸铜、以及补充微蚀液，从而使得微蚀液使用寿命可长达6个月，而且通过硫酸铜的回收，大大降低了生产成本。
摘要（英）：

The invention belongs to the technical field of substrate processing and in particular discloses a method for chemically cleaning a copper surface of a substrate. The method comprises the steps of oil removal, overflow washing for the first time, micro-etching, overflow washing for the second time, and drying. The step of water removal is added between the step of overflow washing for the first time and the step of micro-etching. In the step of micro-etching, in the micro-etching process, copper sulfate is continuously recovered, and micro-etching liquid is supplemented according to the change of concentration of each component in the micro-etching liquid. By removing water, continuously recovering the copper sulfate and supplementing the micro-etching liquid before micro-etching, the service life of the micro-etching liquid can reach 6 months; and by recovering the copper sulfate, production cost is greatly reduced.

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