The invention is directed to a multilayer microfluidic probe (MFP) head (100). The head typically comprises a first (110) and second (120) layers facing each others, and at least one tubing port (182), extending from the first layer (110). The first layer comprises one or more via (112), whereby fluid communication is enabled through the first layer towards the second layer. The second layer comprises at least one microchannel (124), relaying fluid communication to an aperture (122). Such a multilayered MFP head is easier to fabricate than heads made with unitary construction. In particular, a microchannel can advantageously be engraved a groove (124) at the level of the interface between the two layers. The MFP head can further be interfaced with tubing using e.g. a standard fitting for tubing port.; The invention has substantial potential for e.g. patterning continuous and discontinuous patterns of biomolecules on surfaces as well as for direct processing of resist materials in a non- contact mode.