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CN102420235A 固态摄像器件的制造方法、固态摄像器件及电子装置 无效 - 撤回

固态摄像器件的制造方法、固态摄像器件及电子装置
Abstract:
本发明涉及固态摄像器件及其制造方法和使用该固态摄像器件的电子装置。所述固态摄像器件的制造方法包括：在基板的表面上布置的多个光电转换单元中的一些光电转换单元上形成由滤光器材料构成的具有独立岛形状的第一图案；在所述第一图案的侧壁上形成混色防止层；以及在所述多个光电转换单元中的其余光电转换单元上形成由滤光器材料构成的具有独立岛形状的第二图案，使得所述混色防止层紧密地布置在所述第一图案和所述第二图案之间。本发明通过在滤光器的侧壁自对准地形成混色防止层，防止了滤光器之间的混色且增大了滤光器的专有区域，从而能够提高光电转换单元的光接收量。
Abstract(English):

Provided is a method of manufacturing a solid-state imaging device including: forming a first pattern having an independent island shape configured by an optical filter material on some of photoelectric conversion units among a plurality of photoelectric conversion units arranged on the surface of a substrate; forming a mixed color prevention layer on a side wall of the first pattern; and forming a second pattern having an independent island shape configured by an optical filter material on the rest of the photoelectric conversion units among the plurality of photoelectric conversion units while the mixed color prevention layer is closely disposed between the first pattern and the second pattern.

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