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发明公开
CN102403402A 太阳能电池的制造方法 无效 - 驳回 复审申请

太阳能电池的制造方法
摘要：
本发明公开了一种太阳能电池的制造方法。提供一第一型基底，其具有一第一表面与一第二表面。使用一第一掺质对第一型基底的第一表面进行一第一掺杂工艺，以形成一第一型淡掺杂层。使用一第二掺质对部分第一型淡掺杂层进行一第二掺杂工艺，以形成一第二型重掺杂区，其中第二掺质的原子量大于第一掺质的原子量，第一掺杂工艺的温度高于第二掺杂工艺的温度。于第二型重掺杂区上形成一第一电极。于第一型基底的第二表面上形成一第二电极。本发明的方法能于淡掺杂层中清楚地定义深度较浅的重掺杂区，使得作为选择性射极的重掺杂区能对电极提供良好的欧姆接触，进而有效地提升太阳能电池中的再结合效率，使得太阳能电池具有较佳的效率。
摘要（英）：

The invention discloses a solar cell manufacturing method. A first type substrate which comprises a first surface and a second surface is provided. A first type light mixing layer is formed by performing a first mixing technology on the first surface of the first type substrate through first dopant. A second type heavy mixing layer is formed by performing a second mixing technology on a part of the first type light mixing layer through second dopant. The atom volume of the second dopant is larger than that of the first dopant. The temperature of the first mixing technology is higher than that of the second mixing technology. A first electrode is formed on a second type heavy mixing area. A second electrode is formed on the second surface of the first type substrate. The method can make the heavy mixing area with a relatively small depth clearly defined in the light mixing layer and enable the heavy mixing area as the optional emitter to provide excellent ohmic contact for electrodes. The reunion efficiency of the solar cell is further effectively improved. The solar cell thus has relatively good efficiency.

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