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发明授权
CN102034901B 透明导电薄膜及其制备方法 有权

透明导电薄膜及其制备方法
摘要：
本发明涉及一种太阳电池，尤其涉及作为太阳电池的前电极的透明导电薄膜及其制备方法和应用。所述透明导电薄膜的制备方法包括下述步骤：在有氩气存在的压强为0.5～3Pa的气体环境中，在温度为200～300℃的预设有阻挡层的衬底上磁控溅射掺杂氧化锌，形成厚度为800～1200nm的透明导电薄膜。本发明还提供由该制备方法得到的透明导电薄膜以及将该透明导电薄膜刻蚀得到的绒面透明导电薄膜。另外，本发明还涉及含有该绒面透明导电薄膜的复合结构以及太阳电池。本发明的透明导电薄膜经制绒，能得到雾度高的绒面，从而增加太阳光的吸收，提高太阳电池的光电转换效率。
摘要（英）：

The invention relates to a solar cell, in particular to a transparent conductive thin film as a front electrode of a solar cell as well as a preparation method and an application thereof. The preparation method of the transparent conductive thin film comprises the following steps: magnetron-sputtering doped zinc oxide on a substrate with a preset barrier layer at the temperature of 200-300 DEG C in a gas environment with the pressure of 0.5-3Pa in the presence of argon gas; and forming the transparent conductive thin film with the thickness of 800-1200nm. The invention further provides the transparent conductive thin film prepared by the preparation method and a textured transparent conductive thin film obtained by etching the transparent conductive thin film. In addition, the invention further relates to a compound structure containing the textured transparent conductive thin film and the solar cell. The transparent conductive thin film is texture-etched and can obtain the texture with high mist degree, thereby increasing the absorption of sunlight and improving the photoelectric conversion efficiency of the solar cell.

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