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发明授权
CN102027152B 水反应性Al复合材料、水反应性Al膜、该Al膜的制造方法、及成膜室用构成部件 有权

水反应性Al复合材料、水反应性Al膜、该Al膜的制造方法、及成膜室用构成部件
摘要：
本发明提供一种水反应性Al复合材料，其在4NAl或5NAl中，以Al基准计算，添加2～5wt％的In及以与杂质Si量的总和计成为0.04～0.6wt％的量的Si而成。使用该材料制造的Al喷镀膜及该Al膜的制造。在表面具备有该Al喷镀膜的成膜室用构成部件。
摘要（英）：

Herein disclosed are a water-reactive Al composite material which comprises 4NAI or 5NAI containing added In in an amount ranging from 2 to 5% by mass; and added Si and Si as an impurity in a total amount ranging from 0.04 to 0.6% by mass on the basis of the amount of Al; a thermally sprayed Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this thermally sprayed Al film on the surface thereof.

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